ETSF Mass Flow Meter
Explosion Proof Type — With LCD Display.
ETSF SERIES
EXPLOSION PROOF TYPEWITH LCD DISPLAY
- ±2% Accuracy
- Linear Output
- Thermal Technology
- For Using In Non Corrosive Gas
- For Flow Rates up to 100 SLM
- Power Supply Included
The NEW-FLOW ETSF Series-Explosion proof type thermal mass flow meter provide high performance. Thermal technology offers advantages in accuracy, sensitivity and turn quality components and the latest technology are combined to provide reliable, compact meters and controllers. The ETSF Series comes with and LCD diplay, and all models come with linear 0-5VDC and 4~20mA output. The ETSF Series measures the mass flow rate of gases in 23 ranges from 0-10 SCCM to 0-100 SLM as range table.

Technical Data, Dimensions and Principle
- Wetted Parts Material
- Standard flowbody—316 Stainless steel; option available. O-Ring – Viton
- Output Signal
- 0-5 VDC Linear min. load 1000 Ω or 4-20 mA Linear, loop resistance 500 Ω
- Input Power
- 24VDC standard; optional power supply 15VDC 115VAC, 220VAC @500mA
- Accuracy
- ±2% F.S (including Linearity)
- Turn Down Ratio
- 100:1
- Repeatability
- ±0.15% F.S. or Better
- Electric Connection
- 9 Pin Sub “D”
- Process Connection
- 1” NPT female; Flange type available
- Range
- 0-10 SCCM to 0-100 SLM
- Minimum Pressure
- 100” H₂O
- Max. Pressure
- 500 PSIG
- Temperature Range
- 0–50°C
- Response Time
- 1 Second
- Temp. Coefficient
- 0.05% Full Scale per 1°C or Better
- Pressure Coefficient
- 0.01% Full Scale per PSIG or Better
- Weight
- app. 6.5 kg with power supply
Dimensions — mm

Measuring principle

Specify the actual gas and operating conditions for calibration review.
Standard Scales
Standard Scales
| Code | Flow range |
|---|---|
| 00 | 0–10 SCCM |
| 01 | 0–20 SCCM |
| 02 | 0–50 SCCM |
| 03 | 0–100 SCCM |
| 04 | 0–200 SCCM |
| 05 | 0–500 SCCM |
| 06 | 0–1 SLM |
| 07 | 0–2 SLM |
| Code | Flow range |
|---|---|
| 08 | 0–5 SLM |
| 09 | 0–10 SLM |
| 10 | 0–15 SLM |
| 11 | 0–20 SLM |
| 12 | 0–25 SLM |
| 13 | 0–30 SLM |
| 14 | 0–35 SLM |
| 15 | 0–40 SLM |
| Code | Flow range |
|---|---|
| 16 | 0–45 SLM |
| 17 | 0–50 SLM |
| 18 | 0–55 SLM |
| 19 | 0–60 SLM |
| 20 | 0–65 SLM |
| 21 | 0–70 SLM |
| 22 | 0–75 SLM |
| 23 | 0–100 SLM |
24 — Custom flow range
Connection: 1 in NPT female; Other connection — flange available. Custom flow range: maximum 100 SLM.
Build your ETSF ordering code
Choose each option in PDF order. Single available options are selected automatically.
